Inventor
YANG CHING-HAI
TW11 patents
⚠️ This page may combine multiple inventors who share the name “YANG CHING-HAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS9536759B2Jan 3, 2017
Baking apparatus and method
TAIWAN SEMICONDUCTOR MFG CO LTD168 citations97
US9855579B2Jan 2, 2018
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations79
US9793143B2Oct 17, 2017
Semiconductor processing apparatus and method of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US12400866B2Aug 26, 2025
Method and system for manufacturing a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11806743B2Nov 7, 2023
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US11344910B2May 31, 2022
Spin dispenser module substrate surface protection system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations58
US12265327B2Apr 1, 2025
Semiconductor manufacturing apparatus and method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12124168B2Oct 22, 2024
Method and apparatus for coating photoresist over a substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9589820B2Mar 7, 2017
Semiconductor apparatus and adjustment method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48