Inventor
HASAN SHAKEEB BIN
CA5 patents
Patents
5 patentsUS11881374B2Jan 23, 2024
Apparatus for and method of controlling an energy spread of a charged-particle beam
ASML NETHERLANDS BV0 citations59
US12255042B2Mar 18, 2025
Numerically compensating SEM-induced charging using diffusion-based model
ASML NETHERLANDS BV0 citations55
US12092964B2Sep 17, 2024
Optically determining electrical contact between metallic features in different layers in a structure
ASML NETHERLANDS BV0 citations53
US12567558B2Mar 3, 2026
Systems and methods for pulsed voltage contrast detection and capture of charging dynamics
ASML NETHERLANDS BV0 citations48
US12510832B2Dec 30, 2025
Fabrication process deviation determination method, calibration method, inspection tool, fabrication system and a sample
ASML NETHERLANDS BV0 citations48