Inventor
ABEGG ERIK ACHILLES
NL8 patents
Patents
8 patentsUS10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US12298663B2May 13, 2025
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
ASML NETHERLANDS BV1 citations63
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60