Inventor
NASALEVICH MAXIM ALEKSANDROVICH
NL21 patents
Patents
21 patentsUS10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US11287737B2Mar 29, 2022
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV5 citations82
US11971654B2Apr 30, 2024
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV1 citations71
US11686997B2Jun 27, 2023
Metal-silicide-nitridation for stress reduction
ASML NETHERLANDS BV1 citations71
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US11467486B2Oct 11, 2022
Graphene pellicle lithographic apparatus
ASML NETHERLANDS BV4 citations69
US12298663B2May 13, 2025
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
ASML NETHERLANDS BV1 citations63
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11947256B2Apr 2, 2024
Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
ASML NETHERLANDS BV1 citations61
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11314163B2Apr 26, 2022
Pellicle frame and pellicle assembly
ASML NETHERLANDS BV1 citations59
US11287752B2Mar 29, 2022
Cooling apparatus and plasma-cleaning station for cooling apparatus
ASML NETHERLANDS BV0 citations57
US11977326B2May 7, 2024
Pellicle for EUV lithography
ASML NETHERLANDS BV0 citations56
US11143975B2Oct 12, 2021
Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off
ASML NETHERLANDS BV0 citations56
US10976196B2Apr 13, 2021
Sensor mark and a method of manufacturing a sensor mark
ASML NETHERLANDS BV0 citations55