Inventor
VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES
NL11 patents
Patents
11 patentsUS11624980B2Apr 11, 2023
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV2 citations71
US10712657B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV3 citations71
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US12298663B2May 13, 2025
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
ASML NETHERLANDS BV1 citations63
US11971656B2Apr 30, 2024
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations61
US11061320B2Jul 13, 2021
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations61
US10928722B2Feb 23, 2021
Method of manufacturing a membrane assembly for EUV lithography, a membrane assembly, a lithographic apparatus, and a device manufacturing method
ASML NETHERLANDS BV1 citations61
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US12072620B2Aug 27, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations48
US9778574B2Oct 3, 2017
Apparatus, a device and a device manufacturing method
ASML NETHERLANDS BV0 citations43