Inventor
VAN DER ZANDE WILLEM JOAN
NL17 patents
Patents
17 patentsUS10228615B2Mar 12, 2019
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV17 citations93
US10983431B2Apr 20, 2021
Pellicle and pellicle assembly
ASML NETHERLANDS BV5 citations83
US10466585B2Nov 5, 2019
Pellicle and pellicle assembly
ASML NETHERLANDS BV4 citations83
US10698312B2Jun 30, 2020
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV8 citations82
US11320731B2May 3, 2022
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations72
US11231646B2Jan 25, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV1 citations70
US10908496B2Feb 2, 2021
Membrane for EUV lithography
ASML NETHERLANDS BV3 citations70
US10712656B2Jul 14, 2020
Method for manufacturing a membrane assembly
ASML NETHERLANDS BV4 citations70
US12298663B2May 13, 2025
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
ASML NETHERLANDS BV1 citations63
US12066758B2Aug 20, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11347142B2May 31, 2022
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations62
US11036128B2Jun 15, 2021
Membrane assembly
ASML NETHERLANDS BV0 citations61
US12474629B2Nov 18, 2025
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US11762281B2Sep 19, 2023
Membrane for EUV lithography
ASML NETHERLANDS BV0 citations60
US12117726B2Oct 15, 2024
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11754918B2Sep 12, 2023
Pellicle and pellicle assembly
ASML NETHERLANDS BV0 citations59
US11673169B2Jun 13, 2023
Membrane cleaning apparatus
ASML NETHERLANDS BV0 citations56