Inventor
MAKI TETSUYA
JP5 patents
⚠️ This page may combine multiple inventors who share the name “MAKI TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS9401291B2Jul 26, 2016
Coating apparatus
TOKYO ELECTRON LTD6 citations65
US12538825B2Jan 27, 2026
Bonding apparatus, bonding system, and bonding method
TOKYO ELECTRON LTD0 citations49
US11545383B2Jan 3, 2023
Substrate positioning apparatus, substrate positioning method, and bonding apparatus
TOKYO ELECTRON LTD0 citations49
US12308294B2May 20, 2025
Bonding apparatus and bonding method
TOKYO ELECTRON LTD0 citations46