Inventor

LARREY VINCENT

FR18 patents

⚠️ This page may combine multiple inventors who share the name “LARREY VINCENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LARREY VINCENT

COMMISSARIAT ENERGIE ATOMIQUE

Method for producing a device comprising cavities formed between a suspended element resting on insulating pads semi-buried in a substrate and this substrate

Bonding method with electron-stimulated desorption

Heterogeneous substrate including a sacrificial layer, and a method of fabricating it

Method for bonding by direct adhesion

Method for manufacturing a semiconductor structure with temporary direct bonding using a porous layer

Method for direct hydrophilic bonding of substrates

Process for hydrophilically bonding substrates

Process for producing at least one silicon-based nanoelement in a silicon oxide section and process for the manufacture of a device employing the production process

Cationic elements-assisted direct bonding method

Method for bonding two hydrophilic surfaces

Detachable structure used for transferring or handling layers, and process for transferring a layer using the detachable structure

Method of fabricating an electromechanical structure including at least one mechanical reinforcing pillar

Method and device for checking a bond between two substrates

BERTHELOT AUDREY

Structure with a moving portion and a buried electrode for movement detection included in a multi-substrate configuration

COMMISSARIT A L EN ATOMIQUE

Method of fabricating a MEMS/NEMS electromechanical component

Commissariat à l'énergie atomique et aux énergies alternatives

Method for manufacturing a multilayer structure on a substrate

GIROUD SOPHIE

Method for making a suspended membrane structure with buried electrode

PERRUCHOT FRANCOIS

Method of fabricating an electromechanical device including at least one active element