Inventor

SHACKLETON STEVEN C

US23 patents

⚠️ This page may combine multiple inventors who share the name “SHACKLETON STEVEN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SHACKLETON STEVEN C

CANON KK

Imprint apparatus and article manufacturing method

Planarization process, apparatus and method of manufacturing an article

Superstrate and a method of using the same

Planarization process, planarization system, and method of manufacturing an article

Dispenser guard and method of manufacturing an article

Superstrate with an offset mesa and methods of using the same

Planarization process, apparatus and method of manufacturing an article

Pressure sensor manifold with increased photocurable resistance

Systems and methods for detection of and compensation for malfunctioning droplet dispensing nozzles

Planarization process, planarization system and method of manufacturing an article

Shaping system including an evaporation cover, shaping process, and method of manufacturing an article

Method of cleaning fluid dispenser by applying suction force and vibrating meniscus

Transfer cap

Heat exchange system for exchanging heat with a formable material

Method and system for switching a dispensed fluid in a nanofabrication dispensing system

Masked quartz crystal microbalance for calibrating and monitoring inkjet dispensers

System for detecting accumulated material on a faceplate of a dispenser and method of inspecting the faceplate

Pulsation dampener with gas retention

MOLECULAR IMPRINTS INC

Chucking system comprising an array of fluid chambers

System for controlling a volume of material on a mold

Imprint lithography template

Chucking system comprising an array of fluid chambers

Preserving filled features when vacuum wiping