Inventor

WEAVER WILLIAM T

US43 patents

⚠️ This page may combine multiple inventors who share the name “WEAVER WILLIAM T”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WEAVER WILLIAM T

APPLIED MATERIALS INC

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

Multi-position batch load lock apparatus and systems and methods including same

Cartesian cluster tool configuration for lithography type processes

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing

Buffer chamber wafer heating mechanism and supporting robot

Batch heating and cooling chamber or loadlock

Buffer chamber wafer heating mechanism and supporting robots

Susceptor position and rational apparatus and methods of use

Batch LED heating and cooling chamber or loadlock

Workpiece handling architecture for high workpiece throughput

Spinning disk with electrostatic clamped platens for ion implantation

Multi-wafer volume single transfer chamber facet

Buffer chamber wafer heating mechanism and supporting robots

Workpiece handling architecture for high workpiece throughput

Apparatus and methods for wafer rotation to improve spatial ALD process uniformity

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Device and method for substrate heating during transport

Workpiece handling system and methods of workpiece handling

Complementary traveling masks

Electrostatic chuck with LED heating

Shielding device for substrate edge protection and method of using same

High-throughput ion implanter

Linkage conduit for vacuum chamber applications

Mask alignment system for semiconductor processing

Substrate handling and heating system

Transfer chamber and method of using a transfer chamber

VARIAN SEMICONDUCTOR EQUIPMENT

System and method for 2D workpiece alignment

Dynamic heating method and system for wafer processing

Ion source having a shutter assembly

High throughput, low volume clamshell load lock

Optimization of conveyor belts used for workpiece processing

Workpiece alignment device

RIORDON BENJAMIN B

Mask health monitor using a faraday probe

Mask health monitor using a faraday probe

Techniques for processing a substrate

BATEMAN NICHOLAS P T

Aligning successive implants with a soft mask

Implant alignment through a mask

LOW RUSSELL J

Technique for processing a substrate

Handling beam glitches during ion implantation of workpieces

WEAVER WILLIAM T

System and method for handling multiple workpieces for matrix configuration processing

VOPAT ROBERT B

Implant mask with moveable hinged mask segments

CARLSON CHARLES T

Masking apparatus for an ion implanter

DANIEL MALCOLM N

Workpiece alignment device