Inventor
VOPAT ROBERT BRENT
US27 patents
⚠️ This page may combine multiple inventors who share the name “VOPAT ROBERT BRENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS10643867B2May 5, 2020
Annealing system and method
APPLIED MATERIALS INC17 citations85
US10854483B2Dec 1, 2020
High pressure steam anneal processing apparatus
APPLIED MATERIALS INC15 citations84
US10103046B2Oct 16, 2018
Buffer chamber wafer heating mechanism and supporting robot
APPLIED MATERIALS INC6 citations83
US10249525B2Apr 2, 2019
Dynamic leveling process heater lift
APPLIED MATERIALS INC10 citations81
US11315806B2Apr 26, 2022
Batch heating and cooling chamber or loadlock
APPLIED MATERIALS INC2 citations72
US11264258B2Mar 1, 2022
Buffer chamber wafer heating mechanism and supporting robots
APPLIED MATERIALS INC0 citations62
US10597779B2Mar 24, 2020
Susceptor position and rational apparatus and methods of use
APPLIED MATERIALS INC1 citations62
US10283379B2May 7, 2019
Batch LED heating and cooling chamber or loadlock
APPLIED MATERIALS INC1 citations62
US12249522B2Mar 11, 2025
Processing chamber with annealing mini-environment
APPLIED MATERIALS INC0 citations60
US11791176B2Oct 17, 2023
Processing chamber with annealing mini-environment
APPLIED MATERIALS INC0 citations60
US10854491B2Dec 1, 2020
Dynamic leveling process heater lift
APPLIED MATERIALS INC1 citations60
US10699930B2Jun 30, 2020
Buffer chamber wafer heating mechanism and supporting robots
APPLIED MATERIALS INC0 citations51
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
8 patentsUS9899242B2Feb 20, 2018
Device and method for substrate heating during transport
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations73
US9669552B2Jun 6, 2017
System and method for quick-swap of multiple substrates
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations72
US9694989B2Jul 4, 2017
Workpiece handling system and methods of workpiece handling
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US9728430B2Aug 8, 2017
Electrostatic chuck with LED heating
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations52
US10831112B2Nov 10, 2020
Reticle processing system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46
US10256132B2Apr 9, 2019
Reticle processing system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations46
US10443934B2Oct 15, 2019
Substrate handling and heating system
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations41
US10446710B2Oct 15, 2019
Transfer chamber and method of using a transfer chamber
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations40
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS9287148B1Mar 15, 2016
Dynamic heating method and system for wafer processing
VARIAN SEMICONDUCTOR EQUIPMENT17 citations83
US9016998B2Apr 28, 2015
High throughput, low volume clamshell load lock
VARIAN SEMICONDUCTOR EQUIPMENT2 citations62
US9026249B2May 5, 2015
Robot calibration method
VARIAN SEMICONDUCTOR EQUIPMENT2 citations59
US9202734B2Dec 1, 2015
Electrostatic charge removal for solar cell grippers
VARIAN SEMICONDUCTOR EQUIPMENT0 citations51
US9145271B2Sep 29, 2015
Optimization of conveyor belts used for workpiece processing
VARIAN SEMICONDUCTOR EQUIPMENT0 citations50