Inventor
BAEK INKEUN
KR9 patents
Patents
9 patentsUS11680898B2Jun 20, 2023
Hybrid probe, physical property analysis apparatus including the same, and method of measuring semiconductor device using the apparatus
SAMSUNG ELECTRONICS CO LTD0 citations60
US12469750B2Nov 11, 2025
Method of extracting properties of a layer on a wafer
SAMSUNG ELECTRONICS CO LTD0 citations58
US12165933B2Dec 10, 2024
Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US11579168B2Feb 14, 2023
Probe for detecting near field and near-field detecting system including the same
SAMSUNG ELECTRONICS CO LTD0 citations58
US12474260B2Nov 18, 2025
Terahertz signal measuring apparatus and measuring method
SAMSUNG ELECTRONICS CO LTD0 citations57
US11946881B2Apr 2, 2024
Inspection apparatus and inspection method using same
SAMSUNG ELECTRONICS CO LTD0 citations56
US12474393B2Nov 18, 2025
Terahertz probe
SAMSUNG ELECTRONICS CO LTD0 citations55
US11579167B2Feb 14, 2023
Probe for detecting near field and near-field detection system including the same
SAMSUNG ELECTRONICS CO LTD0 citations54
US12196669B2Jan 14, 2025
Inspection apparatus and method of inspecting wafer
SAMSUNG ELECTRONICS CO LTD0 citations46