Inventor
PARK SUHWAN
KR7 patents
Patents
7 patentsUS12469750B2Nov 11, 2025
Method of extracting properties of a layer on a wafer
SAMSUNG ELECTRONICS CO LTD0 citations58
US12165933B2Dec 10, 2024
Semiconductor substrate processing apparatus and semiconductor substrate measuring apparatus using the same
SAMSUNG ELECTRONICS CO LTD1 citations58
US11946881B2Apr 2, 2024
Inspection apparatus and inspection method using same
SAMSUNG ELECTRONICS CO LTD0 citations56
US12474393B2Nov 18, 2025
Terahertz probe
SAMSUNG ELECTRONICS CO LTD0 citations55
US11579167B2Feb 14, 2023
Probe for detecting near field and near-field detection system including the same
SAMSUNG ELECTRONICS CO LTD0 citations54
US12196669B2Jan 14, 2025
Inspection apparatus and method of inspecting wafer
SAMSUNG ELECTRONICS CO LTD0 citations46
US11688623B2Jun 27, 2023
Wafer inspection apparatuses
SAMSUNG ELECTRONICS CO LTD0 citations37