Inventor
YUDOVSKY JOSEPH
US103 patents
⚠️ This page may combine multiple inventors who share the name “YUDOVSKY JOSEPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
48 patentsUS6821563B2Nov 23, 2004
Gas distribution system for cyclical layer deposition
APPLIED MATERIALS INC316 citations99
US6544340B2Apr 8, 2003
Heater with detachable ceramic top plate
APPLIED MATERIALS INC261 citations99
US6146463ANov 14, 2000
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC412 citations99
USRE47440EJun 18, 2019
Apparatus and method for providing uniform flow of gas
APPLIED MATERIALS INC360 citations98
US7798096B2Sep 21, 2010
Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool
APPLIED MATERIALS INC487 citations98
US6868859B2Mar 22, 2005
Rotary gas valve for pulsing a gas
APPLIED MATERIALS INC107 citations98
US6589352B1Jul 8, 2003
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC566 citations98
US6271148B1Aug 7, 2001
Method for improved remote microwave plasma source for use with substrate processing system
APPLIED MATERIALS INC647 citations98
US6168668B1Jan 2, 2001
Shadow ring and guide for supporting the shadow ring in a chamber
APPLIED MATERIALS INC86 citations98
US6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US6818094B2Nov 16, 2004
Reciprocating gas valve for pulsing a gas
APPLIED MATERIALS INC64 citations96
US6375748B1Apr 23, 2002
Method and apparatus for preventing edge deposition
APPLIED MATERIALS INC293 citations96
US6040011AMar 21, 2000
Substrate support member with a purge gas channel and pumping system
APPLIED MATERIALS INC61 citations96
US5985033ANov 16, 1999
Apparatus and method for delivering a gas
APPLIED MATERIALS INC57 citations96
US6730175B2May 4, 2004
Ceramic substrate support
APPLIED MATERIALS INC76 citations95
US6350320B1Feb 26, 2002
Heater for processing chamber
APPLIED MATERIALS INC293 citations95
US6328808B1Dec 11, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC44 citations95
US6026762AFeb 22, 2000
Apparatus for improved remote microwave plasma source for use with substrate processing systems
APPLIED MATERIALS INC54 citations95
US10262888B2Apr 16, 2019
Apparatus and methods for wafer rotation in carousel susceptor
APPLIED MATERIALS INC18 citations94
US10256125B2Apr 9, 2019
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC14 citations93
US6994319B2Feb 7, 2006
Membrane gas valve for pulsing a gas
APPLIED MATERIALS INC48 citations93
US6767176B2Jul 27, 2004
Lift pin actuating mechanism for semiconductor processing chamber
APPLIED MATERIALS INC22 citations93
US6555164B1Apr 29, 2003
Shadow ring and guide for supporting the shadow ring in a chamber
APPLIED MATERIALS INC21 citations93
US6436192B2Aug 20, 2002
Apparatus for aligning a wafer
APPLIED MATERIALS INC18 citations93
US6063440AMay 16, 2000
Method for aligning a wafer
APPLIED MATERIALS INC22 citations93
US9378994B2Jun 28, 2016
Multi-position batch load lock apparatus and systems and methods including same
APPLIED MATERIALS INC19 citations92
US7377002B2May 27, 2008
Scrubber box
APPLIED MATERIALS INC20 citations92
US6374508B1Apr 23, 2002
Apparatus and method for aligning a substrate on a support member
APPLIED MATERIALS INC20 citations92
US6248176B1Jun 19, 2001
Apparatus and method for delivering a gas
APPLIED MATERIALS INC28 citations92
US6186092B1Feb 13, 2001
Apparatus and method for aligning and controlling edge deposition on a substrate
APPLIED MATERIALS INC39 citations92
US7754518B2Jul 13, 2010
Millisecond annealing (DSA) edge protection
APPLIED MATERIALS INC15 citations91
US6223447B1May 1, 2001
Fastening device for a purge ring
APPLIED MATERIALS INC50 citations90
US7222636B2May 29, 2007
Electronically actuated valve
APPLIED MATERIALS INC25 citations89
US6521292B1Feb 18, 2003
Substrate support including purge ring having inner edge aligned to wafer edge
APPLIED MATERIALS INC46 citations89
US11180851B2Nov 23, 2021
Rotary reactor for uniform particle coating with thin films
APPLIED MATERIALS INC9 citations85
US11174552B2Nov 16, 2021
Rotary reactor for uniform particle coating with thin films
APPLIED MATERIALS INC12 citations85
US10586720B2Mar 10, 2020
Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
APPLIED MATERIALS INC12 citations85
US10192770B2Jan 29, 2019
Spring-loaded pins for susceptor assembly and processing methods using same
APPLIED MATERIALS INC10 citations84
US9922860B2Mar 20, 2018
Apparatus and methods for wafer chucking on a susceptor for ALD
APPLIED MATERIALS INC5 citations84
US8955547B2Feb 17, 2015
Apparatus and method for providing uniform flow of gas
APPLIED MATERIALS INC15 citations84
US7748542B2Jul 6, 2010
Batch deposition tool and compressed boat
APPLIED MATERIALS INC11 citations84
US7429717B2Sep 30, 2008
Multizone heater for furnace
APPLIED MATERIALS INC11 citations84
US6503331B1Jan 7, 2003
Tungsten chamber with stationary heater
APPLIED MATERIALS INC18 citations84
US8342119B2Jan 1, 2013
Self aligning non contact shadow ring process kit
APPLIED MATERIALS INC11 citations83
US7833351B2Nov 16, 2010
Batch processing platform for ALD and CVD
APPLIED MATERIALS INC12 citations82
US7779527B2Aug 24, 2010
Methods and apparatus for installing a scrubber brush on a mandrel
APPLIED MATERIALS INC13 citations80
US11222809B2Jan 11, 2022
Patterned vacuum chuck for double-sided processing
APPLIED MATERIALS INC2 citations73
US11094577B2Aug 17, 2021
Apparatus and methods for wafer chucking on a susceptor for ALD
APPLIED MATERIALS INC2 citations73
YUDOVSKY JOSEPH
1 patentCHANG MEI
1 patentShowing the top 50 of 103 patents by PatentIndex Score.