Inventor

SCHALLER JASON M

US49 patents

⚠️ This page may combine multiple inventors who share the name “SCHALLER JASON M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SCHALLER JASON M

APPLIED MATERIALS INC

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

Multi-position batch load lock apparatus and systems and methods including same

Methods and apparatus for extending the reach of a dual scara robot linkage

Wafer handling systems and methods

Robot for simultaneous substrate transfer

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

Robot for simultaneous substrate transfer

High pressure steam anneal processing apparatus

Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing

Buffer chamber wafer heating mechanism and supporting robot

Dynamic leveling process heater lift

Robot for simultaneous substrate transfer

High-density substrate processing systems and methods

Robot for simultaneous substrate transfer

Robot for simultaneous substrate transfer

Batch heating and cooling chamber or loadlock

Coaxial lift device with dynamic leveling

Electrode assembly

Robot for simultaneous substrate transfer

Buffer chamber wafer heating mechanism and supporting robots

Shutter disk for physical vapor deposition chamber

Susceptor position and rational apparatus and methods of use

Batch LED heating and cooling chamber or loadlock

Robot for simultaneous substrate transfer

High-density substrate processing systems and methods

Dynamic leveling process heater lift

Workpiece handling architecture for high workpiece throughput

Substrate transfer structure

Method of assembling drift tube assemblies in ion implantors

Ground path systems for providing a shorter and symmetrical ground path

Buffer chamber wafer heating mechanism and supporting robots

Integrated substrate temperature measurement on high temperature ceramic heater

Workpiece handling architecture for high workpiece throughput

Precision dynamic leveling mechanism with long motion capability

Volume filling cassette for load lock

VARIAN SEMICONDUCTOR EQUIPMENT ASS INC

Semiconductor workpiece temperature measurement system

Device and method for substrate heating during transport

System and method for quick-swap of multiple substrates

Two-dimensional mass resolving slit mechanism for semiconductor processing systems

Workpiece handling system and methods of workpiece handling

Hybrid thermal electrostatic clamp

Semiconductor workpiece temperature measurement system

Electrostatic chuck with LED heating

Apparatus for heating and processing a substrate

Substrate handling and heating system

VARIAN SEMICONDUCTOR EQUIPMENT

Dynamic heating method and system for wafer processing

Dynamic pitch substrate lift

Robot calibration method

Optimization of conveyor belts used for workpiece processing