Inventor

FANG SHENGING

US2 patents

Patents

2 patents

US7803680B2Sep 28, 2010

Self-aligned patterning method by using non-conformal film and etch back for flash memory and other semiconductor applications

SPANSION LLC1 citations59

US9252221B2Feb 2, 2016

Formation of gate sidewall structure

SPANSION LLC0 citations48