Inventor

VOLLMER BERND M

US2 patents

⚠️ This page may combine multiple inventors who share the name “VOLLMER BERND M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SIEMENS AG

1 patent

US5262354ANov 16, 1993

Refractory metal capped low resistivity metal conductor lines and vias

SIEMENS AG187 citations93

IBM

1 patent

US5529670AJun 25, 1996

Method of depositing conductors in high aspect ratio apertures under high temperature conditions

IBM37 citations90