Inventor

KIM RALPH

US2 patents

⚠️ This page may combine multiple inventors who share the name “KIM RALPH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7465673B2Dec 16, 2008

Method and apparatus for bilayer photoresist dry development

TOKYO ELECTRON LTD7 citations70

HUGHES JOHN A

1 patent

US8580075B2Nov 12, 2013

Method and system for introduction of an active material to a chemical process

HUGHES JOHN A0 citations35