Inventor

PILZ MARTIN

DE2 patents

⚠️ This page may combine multiple inventors who share the name “PILZ MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

1 patent

US10185312B2Jan 22, 2019

Insitu tool health and recipe quality monitoring on a CDSEM

GLOBALFOUNDRIES INC2 citations60

PILZ MARTIN

1 patent

US8752805B2Jun 17, 2014

Pressure control valve

PILZ MARTIN2 citations44