Inventor

BAO LIYUAN

US2 patents

Patents

2 patents

US8691023B2Apr 8, 2014

Methods and apparatus for cleaning deposition chamber parts using selective spray etch

BAO LIYUAN116 citations92

US8398779B2Mar 19, 2013

Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates

BAO LIYUAN0 citations45