Inventor
HAYANO TAKANORI
JP3 patents
Patents
3 patentsUS10385474B2Aug 20, 2019
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC2 citations70
US11124894B2Sep 21, 2021
Vapor phase growth apparatus and vapor phase growth method
NUFLARE TECHNOLOGY INC0 citations60
US9916996B2Mar 13, 2018
Vapor phase growth method of growing a film on a substrate while heating the substrate with a heating unit
NUFLARE TECHNOLOGY INC1 citations45