Inventor

ATKINS PHILLIP

US2 patents

Patents

2 patents

US11156548B2Oct 26, 2021

Measurement methodology of advanced nanostructures

KLA TENCOR CORP6 citations69

US11422095B2Aug 23, 2022

Scatterometry modeling in the presence of undesired diffraction orders

KLA TENCOR CORP0 citations44