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Inventor
NOLL SONJA
DE
2 patents
Patents
2 patents
US5224202A
Jun 29, 1993
Apparatus for the evaporation of liquids
LEYBOLD AG
53 citations
93
US5237152A
Aug 17, 1993
Apparatus for thin-coating processes for treating substrates of great surface area
LEYBOLD AG
9 citations
71