Inventor · disambiguated record

George O. Papa

Also filed as: PAPA GEORGE O

1 granted patent·43 citations·filing 1996–1996

48Inventor score

Technology areasC30B

Files withCALIFORNIA INST OF TECHN1

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1 record

0179US5772758ANear real-time extraction of deposition and pre-deposition characteristics from rotating substrates and control of a deposition apparatus in near real-timeCALIFORNIA INST OF TECHN·Filed 1996·Granted Jun 30, 1998·43 cites·21 claims

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