Inventor

WANG YUNGHAO

TW3 patents

Patents

3 patents

US12183573B2Dec 31, 2024

Device and method for high pressure anneal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59

US11854800B2Dec 26, 2023

Device and method for high pressure anneal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59

US11037781B2Jun 15, 2021

Device and method for high pressure anneal

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59