Inventor
SUGIURA HIDEO
JP3 patents
Patents
3 patentsUS4829022AMay 9, 1989
Method for forming thin films of compound semiconductors by flow rate modulation epitaxy
NIPPON TELEGRAPH & TELEPHONE97 citations94
US5273932ADec 28, 1993
Method for forming semiconductor thin films where an argon laser is used to suppress crystal growth
NIPPON TELEGRAPH & TELEPHONE8 citations71
US5186750AFeb 16, 1993
Method and apparatus for forming semiconductor thin films
NIPPON TELEGRAPH & TELEPHONE11 citations71