Inventor
HSIEH CHIH-HSUAN
TW5 patents
Patents
5 patentsUS11268186B2Mar 8, 2022
Target structure of physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations69
US11649543B2May 16, 2023
Target structure of physical vapor deposition
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11318579B2May 3, 2022
Multiple nozzle slurry dispense scheme
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55
US10651296B2May 12, 2020
Methods of fabricating Fin Field Effect Transistor (FinFET) devices with uniform tension using implantations on top and sidewall of Fin
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44
US10335920B2Jul 2, 2019
Multiple nozzle slurry dispense scheme
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44