Inventor

FOLLSTAEDT DAVID M

US3 patents

Patents

3 patents

US6599362B2Jul 29, 2003

Cantilever epitaxial process

SANDIA CORP116 citations92

US5840590ANov 24, 1998

Impurity gettering in silicon using cavities formed by helium implantation and annealing

SANDIA CORP92 citations88

US6866560B1Mar 15, 2005

Method for thinning specimen

SANDIA CORP12 citations78