Inventor

TERAI ASUKA

JP2 patents

Patents

2 patents

US7567872B2Jul 28, 2009

Film forming condition determination method, film forming method, and film structure manufacturing method

HORIBA LTD2 citations58

US7280208B2Oct 9, 2007

Optical characteristic analysis method, sample measuring apparatus and spectroscopic ellipsometer

HORIBA LTD6 citations58