Inventor

JUR JORDAN

US3 patents

Patents

3 patents

US9357625B2May 31, 2016

Extreme ultraviolet light source

ASML NETHERLANDS BV11 citations79

US10064261B2Aug 28, 2018

Extreme ultraviolet light source

ASML NETHERLANDS BV3 citations68

US9826616B2Nov 21, 2017

Extreme ultraviolet light source utilizing a target of finite extent

ASML NETHERLANDS BV0 citations49