Inventor

WISCHMEYER FRANK

DE3 patents

⚠️ This page may combine multiple inventors who share the name “WISCHMEYER FRANK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIXTRON AG

2 patents

US7048802B2May 23, 2006

CVD reactor with graphite-foam insulated, tubular susceptor

AIXTRON AG17 citations81

US6811614B2Nov 2, 2004

CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream

AIXTRON AG18 citations81

KAEPPELER JOHANNES

1 patent

US8062426B2Nov 22, 2011

CVD reactor with RF-heated process chamber

KAEPPELER JOHANNES4 citations57