Inventor

CHAO WEILUN

US2 patents

⚠️ This page may combine multiple inventors who share the name “CHAO WEILUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OLYNICK DEIRDRE

1 patent

US8546264B2Oct 1, 2013

Etching radical controlled gas chopped deep reactive ion etching

OLYNICK DEIRDRE7 citations73

UNIV COLORADO STATE RES FOUND

1 patent

US7931850B2Apr 26, 2011

Nanometer-scale ablation using focused, coherent extreme ultraviolet/soft x-ray light

UNIV COLORADO STATE RES FOUND2 citations58