Inventor
HATAKEYAMA MASAHIRO
JP100 patents
⚠️ This page may combine multiple inventors who share the name “HATAKEYAMA MASAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
40 patentsUS7138629B2Nov 21, 2006
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP151 citations99
US7109483B2Sep 19, 2006
Method for inspecting substrate, substrate inspecting system and electron beam apparatus
EBARA CORP159 citations99
US6855929B2Feb 15, 2005
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP106 citations99
US9368314B2Jun 14, 2016
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP38 citations98
US7928382B2Apr 19, 2011
Detector and inspecting apparatus
EBARA CORP51 citations98
US7220604B2May 22, 2007
Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those
EBARA CORP59 citations98
US5852298ADec 22, 1998
Micro-processing apparatus and method therefor
EBARA CORP115 citations97
US7741601B2Jun 22, 2010
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP36 citations96
US7365324B2Apr 29, 2008
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP49 citations96
US7223973B2May 29, 2007
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP38 citations96
US6671034B1Dec 30, 2003
Microfabrication of pattern imprinting
EBARA CORP47 citations96
US6015976AJan 18, 2000
Fabrication apparatus employing energy beam
EBARA CORP51 citations96
US6010831AJan 4, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP40 citations96
US5883470AMar 16, 1999
Fast atomic beam source with an inductively coupled plasma generator
EBARA CORP70 citations96
US5868952AFeb 9, 1999
Fabrication method with energy beam
EBARA CORP73 citations96
US8053726B2Nov 8, 2011
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP11 citations93
US7928378B2Apr 19, 2011
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP17 citations93
US7569838B2Aug 4, 2009
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP23 citations93
US7411191B2Aug 12, 2008
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP20 citations93
US7408175B2Aug 5, 2008
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former
EBARA CORP19 citations93
US7385197B2Jun 10, 2008
Electron beam apparatus and a device manufacturing method using the same apparatus
EBARA CORP30 citations93
US7351969B2Apr 1, 2008
Electron beam inspection system and inspection method and method of manufacturing devices using the system
EBARA CORP37 citations93
US7285010B2Oct 23, 2007
TDI detecting device, a feed-through equipment and electron beam apparatus using these devices
EBARA CORP19 citations93
US7129485B2Oct 31, 2006
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP30 citations93
US8946631B2Feb 3, 2015
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP11 citations92
US6048671AApr 11, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP24 citations92
US6007969ADec 28, 1999
Ultra-fine microfabrication method using an energy beam
EBARA CORP32 citations92
US5998097ADec 7, 1999
Fabrication method employing energy beam source
EBARA CORP43 citations92
US5989779ANov 23, 1999
Fabrication method employing and energy beam source
EBARA CORP25 citations92
US5894058AApr 13, 1999
Ultra-fine microfabrication method using a fast atomic energy beam
EBARA CORP32 citations92
US5770123AJun 23, 1998
Method and apparatus for energy beam machining
EBARA CORP51 citations92
US5677011AOct 14, 1997
Processing method using fast atom beam
EBARA CORP56 citations91
US9406480B2Aug 2, 2016
Testing apparatus using charged particles and device manufacturing method using the testing apparatus
EBARA CORP3 citations84
US8803103B2Aug 12, 2014
Inspection system by charged particle beam and method of manufacturing devices using the system
EBARA CORP6 citations84
US8742344B2Jun 3, 2014
Inspection apparatus
EBARA CORP10 citations84
US8368018B2Feb 5, 2013
Method and apparatus for charged particle beam inspection
EBARA CORP11 citations84
US7888642B2Feb 15, 2011
Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
EBARA CORP9 citations84
US7863580B2Jan 4, 2011
Electron beam apparatus and an aberration correction optical apparatus
EBARA CORP7 citations84
US6949735B1Sep 27, 2005
Beam source
EBARA CORP20 citations84
US5708267AJan 13, 1998
Processing method using fast atom beam
EBARA CORP17 citations84
TOSHIBA KK
4 patentsUS6992290B2Jan 31, 2006
Electron beam inspection system and inspection method and method of manufacturing devices using the system
TOSHIBA KK97 citations98
US6909092B2Jun 21, 2005
Electron beam apparatus and device manufacturing method using same
TOSHIBA KK77 citations98
US7241993B2Jul 10, 2007
Inspection system by charged particle beam and method of manufacturing devices using the system
TOSHIBA KK54 citations96
US7075072B2Jul 11, 2006
Detecting apparatus and device manufacturing method
TOSHIBA KK12 citations84
HATAKEYAMA MASAHIRO
2 patentsNIKON CORP
1 patentKIMBA TOSHIFUMI
1 patentWATANABE KENJI
1 patentNOJI NOBUHARU
1 patentShowing the top 50 of 100 patents by PatentIndex Score.