Inventor
ICHIKI KATSUNORI
JP29 patents
⚠️ This page may combine multiple inventors who share the name “ICHIKI KATSUNORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
25 patentsUS6861642B2Mar 1, 2005
Neutral particle beam processing apparatus
EBARA CORP421 citations99
US6849857B2Feb 1, 2005
Beam processing apparatus
EBARA CORP352 citations99
US5852298ADec 22, 1998
Micro-processing apparatus and method therefor
EBARA CORP115 citations97
US6671034B1Dec 30, 2003
Microfabrication of pattern imprinting
EBARA CORP47 citations96
US6015976AJan 18, 2000
Fabrication apparatus employing energy beam
EBARA CORP51 citations96
US6010831AJan 4, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP40 citations96
US5883470AMar 16, 1999
Fast atomic beam source with an inductively coupled plasma generator
EBARA CORP70 citations96
US5868952AFeb 9, 1999
Fabrication method with energy beam
EBARA CORP73 citations96
US6048671AApr 11, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP24 citations92
US6007969ADec 28, 1999
Ultra-fine microfabrication method using an energy beam
EBARA CORP32 citations92
US5998097ADec 7, 1999
Fabrication method employing energy beam source
EBARA CORP43 citations92
US5989779ANov 23, 1999
Fabrication method employing and energy beam source
EBARA CORP25 citations92
US5894058AApr 13, 1999
Ultra-fine microfabrication method using a fast atomic energy beam
EBARA CORP32 citations92
US5770123AJun 23, 1998
Method and apparatus for energy beam machining
EBARA CORP51 citations92
US6949735B1Sep 27, 2005
Beam source
EBARA CORP20 citations84
US6861643B2Mar 1, 2005
Neutral particle beam processing apparatus
EBARA CORP14 citations84
US6099698AAug 8, 2000
Magnetic disc and method of manufacturing same
EBARA CORP17 citations82
US7588671B2Sep 15, 2009
Microfluidic treatment method and device
EBARA CORP12 citations79
US7314574B2Jan 1, 2008
Etching method and apparatus
EBARA CORP7 citations74
US7115354B2Oct 3, 2006
Microfabrication of pattern imprinting
EBARA CORP7 citations74
US6194048B1Feb 27, 2001
Magnetic recording disk
EBARA CORP14 citations73
US6468598B1Oct 22, 2002
Magnetic disk and method of making thereof
EBARA CORP10 citations72
US6909087B2Jun 21, 2005
Method of processing a surface of a workpiece
EBARA CORP5 citations63
US6858838B2Feb 22, 2005
Neutral particle beam processing apparatus
EBARA CORP4 citations63
US6627095B2Sep 30, 2003
Magnetic recording disk and method of manufacturing same
EBARA CORP3 citations62