Inventor
HATAMURA YOTARO
JP29 patents
⚠️ This page may combine multiple inventors who share the name “HATAMURA YOTARO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
13 patentsUS5852298ADec 22, 1998
Micro-processing apparatus and method therefor
EBARA CORP115 citations97
US6671034B1Dec 30, 2003
Microfabrication of pattern imprinting
EBARA CORP47 citations96
US6015976AJan 18, 2000
Fabrication apparatus employing energy beam
EBARA CORP51 citations96
US6010831AJan 4, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP40 citations96
US5868952AFeb 9, 1999
Fabrication method with energy beam
EBARA CORP73 citations96
US6048671AApr 11, 2000
Ultra-fine microfabrication method using an energy beam
EBARA CORP24 citations92
US6007969ADec 28, 1999
Ultra-fine microfabrication method using an energy beam
EBARA CORP32 citations92
US5998097ADec 7, 1999
Fabrication method employing energy beam source
EBARA CORP43 citations92
US5989779ANov 23, 1999
Fabrication method employing and energy beam source
EBARA CORP25 citations92
US5894058AApr 13, 1999
Ultra-fine microfabrication method using a fast atomic energy beam
EBARA CORP32 citations92
US5770123AJun 23, 1998
Method and apparatus for energy beam machining
EBARA CORP51 citations92
US7115354B2Oct 3, 2006
Microfabrication of pattern imprinting
EBARA CORP7 citations74
US6835317B2Dec 28, 2004
Method of making substrate with micro-protrusions or micro-cavities
EBARA CORP6 citations63
HATAMURA YOTARO
12 patentsUS4686440AAug 11, 1987
Fine positioning device
HATAMURA YOTARO81 citations96
US4576053AMar 18, 1986
Load detector
HATAMURA YOTARO77 citations96
US5142424AAug 25, 1992
Floatable information-reading head support configured to prevent forward pitch
HATAMURA YOTARO34 citations92
US4874032AOct 17, 1989
Die casting controlling method
HATAMURA YOTARO36 citations92
US4628745ADec 16, 1986
Multi-axis load sensor
HATAMURA YOTARO26 citations92
US4674339AJun 23, 1987
Multi-axis load sensor
HATAMURA YOTARO27 citations90
US4712431ADec 15, 1987
Multi-axis load sensor
HATAMURA YOTARO17 citations82
US4485681ADec 4, 1984
Thrust-torque detector
HATAMURA YOTARO20 citations82
US4671118AJun 9, 1987
Load sensor
HATAMURA YOTARO8 citations74
US4520679AJun 4, 1985
Load converter
HATAMURA YOTARO16 citations74
US4586577AMay 6, 1986
Load converter
HATAMURA YOTARO2 citations63
US4491028AJan 1, 1985
Pressure transducer
HATAMURA YOTARO6 citations63