Inventor
NAKAO MASAYUKI
JP17 patents
⚠️ This page may combine multiple inventors who share the name “NAKAO MASAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
9 patentsUS5852298ADec 22, 1998
Micro-processing apparatus and method therefor
EBARA CORP115 citations97
US6671034B1Dec 30, 2003
Microfabrication of pattern imprinting
EBARA CORP47 citations96
US6015976AJan 18, 2000
Fabrication apparatus employing energy beam
EBARA CORP51 citations96
US5868952AFeb 9, 1999
Fabrication method with energy beam
EBARA CORP73 citations96
US5998097ADec 7, 1999
Fabrication method employing energy beam source
EBARA CORP43 citations92
US5989779ANov 23, 1999
Fabrication method employing and energy beam source
EBARA CORP25 citations92
US5770123AJun 23, 1998
Method and apparatus for energy beam machining
EBARA CORP51 citations92
US7115354B2Oct 3, 2006
Microfabrication of pattern imprinting
EBARA CORP7 citations74
US6835317B2Dec 28, 2004
Method of making substrate with micro-protrusions or micro-cavities
EBARA CORP6 citations63