Inventor
KINNARD DAVID W
US6 patents
⚠️ This page may combine multiple inventors who share the name “KINNARD DAVID W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
3 patentsUS6635117B1Oct 21, 2003
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
AXCELIS TECH INC609 citations97
US6782843B2Aug 31, 2004
Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system
AXCELIS TECH INC68 citations94
US6259072B1Jul 10, 2001
Zone controlled radiant heating system utilizing focused reflector
AXCELIS TECH INC58 citations93