Inventor

LIN HUIN-JER

TW2 patents

Patents

2 patents

US6849531B1Feb 1, 2005

Phosphoric acid free process for polysilicon gate definition

TAIWAN SEMICONDUCTOR MFG15 citations82

US7307009B2Dec 11, 2007

Phosphoric acid free process for polysilicon gate definition

TAIWAN SEMICONDUCTOR MFG0 citations50