Inventor
ANDERSON THOMAS W
US32 patents
⚠️ This page may combine multiple inventors who share the name “ANDERSON THOMAS W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
17 patentsUS6988326B2Jan 24, 2006
Phobic barrier meniscus separation and containment
LAM RES CORP59 citations96
US10354838B1Jul 16, 2019
RF antenna producing a uniform near-field Poynting vector
LAM RES CORP27 citations93
US6646857B2Nov 11, 2003
Semiconductor wafer lifting device and methods for implementing the same
LAM RES CORP68 citations91
US6101419AAug 8, 2000
Modular control system for manufacturing facility
LAM RES CORP37 citations89
US10685810B2Jun 16, 2020
RF antenna producing a uniform near-field Poynting vector
LAM RES CORP12 citations84
US7018269B2Mar 28, 2006
Pad conditioner control using feedback from a measured polishing pad roughness level
LAM RES CORP15 citations84
US6995067B2Feb 7, 2006
Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency
LAM RES CORP10 citations73
US12283462B2Apr 22, 2025
Control of plasma formation by RF coupling structures
LAM RES CORP2 citations69
US7503977B1Mar 17, 2009
Solidifying layer for wafer cleaning
LAM RES CORP6 citations63
US7053000B2May 30, 2006
System, method and apparatus for constant voltage control of RF generator for optimum operation
LAM RES CORP4 citations61
US7033845B2Apr 25, 2006
Phase control of megasonic RF generator for optimum operation
LAM RES CORP3 citations61
US12198896B2Jan 14, 2025
Compact high density plasma source
LAM RES CORP1 citations59
US12546802B2Feb 10, 2026
Voltage and current probe assemblies for radio frequency current carrying conductors
LAM RES CORP0 citations56
US7909934B2Mar 22, 2011
Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency
LAM RES CORP0 citations52
US7326581B2Feb 5, 2008
System, method and apparatus for automatic control of an RF generator for maximum efficiency
LAM RES CORP1 citations52
US6998349B2Feb 14, 2006
System, method and apparatus for automatic control of an RF generator for maximum efficiency
LAM RES CORP0 citations52
US10460914B2Oct 29, 2019
Ferrite cage RF isolator for power circuitry
LAM RES CORP0 citations39
AT & T BELL LAB
4 patentsUS5327489AJul 5, 1994
Method and apparatus for monitoring a network for customer signaling during the term of a call
AT & T BELL LAB73 citations90
US4545043AOct 1, 1985
Announcement system message playback arrangement
AT & T BELL LAB24 citations78
US4644527AFeb 17, 1987
Interface unit for transferring voice and data signals
AT & T BELL LAB22 citations72
US4551670ANov 5, 1985
Circuit for maintaining the DC voltage on an electrically isolated telecommunication line at a reference level
AT & T BELL LAB10 citations64