P

Inventor

ANDERSON THOMAS W

US32 patents
⚠️ This page may combine multiple inventors who share the name “ANDERSON THOMAS W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

17 patents
US6988326B2Jan 24, 2006

Phobic barrier meniscus separation and containment

LAM RES CORP59 citations96
US10354838B1Jul 16, 2019

RF antenna producing a uniform near-field Poynting vector

LAM RES CORP27 citations93
US6646857B2Nov 11, 2003

Semiconductor wafer lifting device and methods for implementing the same

LAM RES CORP68 citations91
US6101419AAug 8, 2000

Modular control system for manufacturing facility

LAM RES CORP37 citations89
US10685810B2Jun 16, 2020

RF antenna producing a uniform near-field Poynting vector

LAM RES CORP12 citations84
US7018269B2Mar 28, 2006

Pad conditioner control using feedback from a measured polishing pad roughness level

LAM RES CORP15 citations84
US6995067B2Feb 7, 2006

Megasonic cleaning efficiency using auto-tuning of an RF generator at constant maximum efficiency

LAM RES CORP10 citations73
US12283462B2Apr 22, 2025

Control of plasma formation by RF coupling structures

LAM RES CORP2 citations69
US7503977B1Mar 17, 2009

Solidifying layer for wafer cleaning

LAM RES CORP6 citations63
US7053000B2May 30, 2006

System, method and apparatus for constant voltage control of RF generator for optimum operation

LAM RES CORP4 citations61
US7033845B2Apr 25, 2006

Phase control of megasonic RF generator for optimum operation

LAM RES CORP3 citations61
US12198896B2Jan 14, 2025

Compact high density plasma source

LAM RES CORP1 citations59
US12546802B2Feb 10, 2026

Voltage and current probe assemblies for radio frequency current carrying conductors

LAM RES CORP0 citations56
US7909934B2Mar 22, 2011

Megasonic cleaning efficiency using auto-tuning of a RF generator at constant maximum efficiency

LAM RES CORP0 citations52
US7326581B2Feb 5, 2008

System, method and apparatus for automatic control of an RF generator for maximum efficiency

LAM RES CORP1 citations52
US6998349B2Feb 14, 2006

System, method and apparatus for automatic control of an RF generator for maximum efficiency

LAM RES CORP0 citations52
US10460914B2Oct 29, 2019

Ferrite cage RF isolator for power circuitry

LAM RES CORP0 citations39

AT & T BELL LAB

4 patents

AT & T CORP

2 patents

ANDERSON THOMAS W

2 patents

BELL TELEPHONE LABOR INC

2 patents

ALCATEL LUCENT USA INC

1 patent

LOCKHEED MARTIN MISSILES & SPA

1 patent

(unassigned)

1 patent

US NAVY

1 patent

SRIDHAR KAMAKSHI

1 patent