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Inventor
KASIC ALEXANDER
DE
2 patents
⚠️ This page may combine multiple inventors who share the name “KASIC ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
QIMONDA AG
1 patent
US7773232B2
Aug 10, 2010
Apparatus and method for determining trench parameters
QIMONDA AG
4 citations
54
INFINEON TECHNOLOGIES AG
1 patent
US7372579B2
May 13, 2008
Apparatus and method for monitoring trench profiles and for spectrometrologic analysis
INFINEON TECHNOLOGIES AG
6 citations
54