Inventor · disambiguated record

Anita Klee

Also filed as: KLEE ANITA

1 granted patent·6 citations·filing 2006–2006

27Inventor score

Technology areasG01B

Files withINFINEON TECHNOLOGIES AG1

Top patents by PatentIndex Score

1 record

0164US7372579B2Apparatus and method for monitoring trench profiles and for spectrometrologic analysisINFINEON TECHNOLOGIES AG·Filed 2006·Granted May 13, 2008·6 cites·25 claims

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