Inventor
KOPACZ STANISLAW
US8 patents
⚠️ This page may combine multiple inventors who share the name “KOPACZ STANISLAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6368987B1Apr 9, 2002
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD642 citations96
US6161500ADec 19, 2000
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD814 citations96
US6652656B2Nov 25, 2003
Semiconductor wafer holding assembly
TOKYO ELECTRON LTD17 citations92
US6692219B2Feb 17, 2004
Reduced edge contact wafer handling system and method of retrofitting and using same
TOKYO ELECTRON LTD46 citations87
US6767846B2Jul 27, 2004
Method of securing a substrate in a semiconductor processing machine
TOKYO ELECTRON LTD8 citations73