Inventor
FOSTER ROBERT F
US36 patents
⚠️ This page may combine multiple inventors who share the name “FOSTER ROBERT F”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS5866213AFeb 2, 1999
Method for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
TOKYO ELECTRON LTD140 citations99
US6368987B1Apr 9, 2002
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD642 citations96
US6161500ADec 19, 2000
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD814 citations96
US6220202B1Apr 24, 2001
Apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition
TOKYO ELECTRON LTD29 citations92
US6140215AOct 31, 2000
Method and apparatus for low temperature deposition of CVD and PECVD films
TOKYO ELECTRON LTD23 citations92
US6037252AMar 14, 2000
Method of titanium nitride contact plug formation
TOKYO ELECTRON LTD35 citations92
US5972790AOct 26, 1999
Method for forming salicides
TOKYO ELECTRON LTD24 citations92
US7001491B2Feb 21, 2006
Vacuum-processing chamber-shield and multi-chamber pumping method
TOKYO ELECTRON LTD45 citations91
US6221770B1Apr 24, 2001
Low temperature plasma-enhanced formation of integrated circuits
TOKYO ELECTRON LTD13 citations74
US6730605B2May 4, 2004
Redistribution of copper deposited films
TOKYO ELECTRON LTD5 citations61
SONY CORP
8 patentsUS5665640ASep 9, 1997
Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
SONY CORP128 citations99
US5567243AOct 22, 1996
Apparatus for producing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
SONY CORP366 citations99
US5628829AMay 13, 1997
Method and apparatus for low temperature deposition of CVD and PECVD films
SONY CORP270 citations98
US5593511AJan 14, 1997
Method of nitridization of titanium thin films
SONY CORP58 citations96
US5567483AOct 22, 1996
Process for plasma enhanced anneal of titanium nitride
SONY CORP62 citations96
US5716870AFeb 10, 1998
Method for producing titanium thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
SONY CORP29 citations92
US5610106AMar 11, 1997
Plasma enhanced chemical vapor deposition of titanium nitride using ammonia
SONY CORP48 citations92
US5575856ANov 19, 1996
Thermal cycle resistant seal and method of sealing for use with semiconductor wafer processing apparatus
SONY CORP7 citations68
MATERIALS RESEARCH CORP
6 patentsUS5370739ADec 6, 1994
Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD
MATERIALS RESEARCH CORP188 citations98
US5273588ADec 28, 1993
Semiconductor wafer processing CVD reactor apparatus comprising contoured electrode gas directing means
MATERIALS RESEARCH CORP228 citations98
US5356476AOct 18, 1994
Semiconductor wafer processing method and apparatus with heat and gas flow control
MATERIALS RESEARCH CORP151 citations97
US5975912ANov 2, 1999
Low temperature plasma-enhanced formation of integrated circuits
MATERIALS RESEARCH CORP53 citations96
US5342652AAug 30, 1994
Method of nucleating tungsten on titanium nitride by CVD without silane
MATERIALS RESEARCH CORP123 citations93
US5434110AJul 18, 1995
Methods of chemical vapor deposition (CVD) of tungsten films on patterned wafer substrates
MATERIALS RESEARCH CORP35 citations92
TARGET BRANDS INC
6 patentsUS9031872B1May 12, 2015
Digital sign with incorrectly stocked item identification
TARGET BRANDS INC27 citations93
US9171448B1Oct 27, 2015
RFID tags for locating products
TARGET BRANDS INC11 citations84
US8866612B1Oct 21, 2014
Suppressing alerts for RFID systems
TARGET BRANDS INC18 citations84
US9153109B1Oct 6, 2015
Mobile device cover with theft protection
TARGET BRANDS INC19 citations83
US9185359B1Nov 10, 2015
Enterprise-wide camera data
TARGET BRANDS INC3 citations54
US11087270B1Aug 10, 2021
Indexing video for retail investigations
TARGET BRANDS INC0 citations52