Inventor
ROWAN JR ROBERT CLARK
US4 patents
⚠️ This page may combine multiple inventors who share the name “ROWAN JR ROBERT CLARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
2 patentsUS6368987B1Apr 9, 2002
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD642 citations96
US6161500ADec 19, 2000
Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions
TOKYO ELECTRON LTD814 citations96