Inventor

NARUKAWA KUNIYUKI

JP2 patents

Patents

2 patents

US6933609B2Aug 23, 2005

Interconnection structure and interconnection structure formation method

FUJITSU LTD21 citations85

US7145241B2Dec 5, 2006

Semiconductor device having a multilayer interconnection structure and fabrication process thereof

FUJITSU LTD15 citations82