Inventor
NISHINA AKIRA
JP9 patents
Patents
9 patentsUS6523567B2Feb 25, 2003
Apparatus and process for supplying gas
NIPPON OXYGEN CO LTD20 citations83
US6324892B1Dec 4, 2001
Multi-gas analysis system for analyzing high-purity gases
NIPPON OXYGEN CO LTD17 citations83
US6478040B1Nov 12, 2002
Gas supplying apparatus and gas substitution method
NIPPON OXYGEN CO LTD9 citations73
US6474136B1Nov 5, 2002
Method and apparatus for analyzing impurities in gases
NIPPON OXYGEN CO LTD10 citations73
US6418781B1Jul 16, 2002
System for analyzing trace amounts of impurities in gases
NIPPON OXYGEN CO LTD13 citations73
US6397660B1Jun 4, 2002
Gas analyzing apparatus
NIPPON OXYGEN CO LTD9 citations73
US6000275ADec 14, 1999
Method for analyzing impurities in gas and its analyzer
NIPPON OXYGEN CO LTD8 citations68
US6653144B1Nov 25, 2003
Method and an apparatus for analyzing trace impurities in gases
NIPPON OXYGEN CO LTD2 citations62
US6550308B2Apr 22, 2003
Gas analyzing apparatus
NIPPON OXYGEN CO LTD4 citations62