Inventor
TAKEYA KOJI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “TAKEYA KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS9991138B2Jun 5, 2018
Etching method and etching apparatus
TOKYO ELECTRON LTD337 citations98
US7554095B2Jun 30, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method, and method of manufacturing substrate
TOKYO ELECTRON LTD7 citations71
US7521687B2Apr 21, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD5 citations71
US9607855B2Mar 28, 2017
Etching method and storage medium
TOKYO ELECTRON LTD2 citations70
US10460946B2Oct 29, 2019
Naturally oxidized film removing method and naturally oxidized film removing device
TOKYO ELECTRON LTD1 citations62
US10312079B2Jun 4, 2019
Etching method
TOKYO ELECTRON LTD1 citations60
US7550739B2Jun 23, 2009
Static electricity deflecting device, electron beam irradiating apparatus, substrate processing apparatus, substrate processing method and method of manufacturing substrate
TOKYO ELECTRON LTD0 citations50
US10734242B2Aug 4, 2020
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations41