Inventor
NAM KAB-JIN
KR9 patents
Patents
9 patentsUS6500763B2Dec 31, 2002
Method for manufacturing an electrode of a capacitor
SAMSUNG ELECTRONICS CO LTD72 citations96
US6218260B1Apr 17, 2001
Methods of forming integrated circuit capacitors having improved electrode and dielectric layer characteristics and capacitors formed thereby
SAMSUNG ELECTRONICS CO LTD76 citations95
US6207489B1Mar 27, 2001
Method for manufacturing capacitor of semiconductor memory device having tantalum oxide film
SAMSUNG ELECTRONICS CO LTD35 citations92
US6136641AOct 24, 2000
Method for manufacturing capacitor of semiconductor device including thermal treatment to dielectric film under hydrogen atmosphere
SAMSUNG ELECTRONICS CO LTD39 citations92
US5939131AAug 17, 1999
Methods for forming capacitors including rapid thermal oxidation
SAMSUNG ELECTRONICS CO LTD30 citations92
US6133148AOct 17, 2000
Method of depositing film for semiconductor device in single wafer type apparatus using a lamp heating method
SAMSUNG ELECTRONICS CO LTD36 citations89
US6624069B2Sep 23, 2003
Methods of forming integrated circuit capacitors having doped HSG electrodes
SAMSUNG ELECTRONICS CO LTD12 citations73
US6876029B2Apr 5, 2005
Integrated circuit capacitors having doped HSG electrodes
SAMSUNG ELECTRONICS CO LTD4 citations62
US12133393B2Oct 29, 2024
Method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations57