Inventor
KYOGOKU MITSUSUKE
JP8 patents
⚠️ This page may combine multiple inventors who share the name “KYOGOKU MITSUSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
5 patentsUS5571330ANov 5, 1996
Load lock chamber for vertical type heat treatment apparatus
ASM JAPAN81 citations94
US6053686AApr 25, 2000
Device and method for load locking for semiconductor processing
ASM JAPAN43 citations91
US5484483AJan 16, 1996
Thermal treatment apparatus
ASM JAPAN22 citations91
US6743329B1Jun 1, 2004
Sealing mechanism of multi-chamber load-locking device
ASM JAPAN12 citations73
US5509967AApr 23, 1996
Heat treatment apparatus
ASM JAPAN3 citations57