Inventor
YAMAGISHI TAKAYUKI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGISHI TAKAYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM JAPAN
15 patentsUS7021881B2Apr 4, 2006
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
ASM JAPAN545 citations99
US6955741B2Oct 18, 2005
Semiconductor-processing reaction chamber
ASM JAPAN380 citations99
US6899507B2May 31, 2005
Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
ASM JAPAN561 citations99
US6662817B2Dec 16, 2003
Gas-line system for semiconductor-manufacturing apparatus
ASM JAPAN496 citations99
US7690881B2Apr 6, 2010
Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus
ASM JAPAN523 citations97
US6305898B1Oct 23, 2001
Wafer transfer mechanism
ASM JAPAN567 citations96
US7638003B2Dec 29, 2009
Semiconductor processing apparatus with lift pin structure
ASM JAPAN21 citations93
US7520244B2Apr 21, 2009
Plasma treatment apparatus
ASM JAPAN21 citations92
US7276123B2Oct 2, 2007
Semiconductor-processing apparatus provided with susceptor and placing block
ASM JAPAN30 citations92
US6630053B2Oct 7, 2003
Semiconductor processing module and apparatus
ASM JAPAN55 citations92
US7467916B2Dec 23, 2008
Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same
ASM JAPAN19 citations84
US6454516B1Sep 24, 2002
Semiconductor substrate aligner apparatus and method
ASM JAPAN18 citations84
US6743329B1Jun 1, 2004
Sealing mechanism of multi-chamber load-locking device
ASM JAPAN12 citations73
US6945746B2Sep 20, 2005
Semiconductor manufacturing equipment and maintenance method
ASM JAPAN5 citations63
US6860711B2Mar 1, 2005
Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers
ASM JAPAN4 citations63
ASM IP HOLDING BV
14 patentsUS9370863B2Jun 21, 2016
Anti-slip end-effector for transporting workpiece
ASM IP HOLDING BV473 citations99
USD753269SApr 5, 2016
Top plate
ASM IP HOLDING BV479 citations99
USD743513SNov 17, 2015
Seal ring
ASM IP HOLDING BV548 citations99
USD735836SAug 4, 2015
Shower plate
ASM IP HOLDING BV527 citations99
USD733843SJul 7, 2015
Shower plate
ASM IP HOLDING BV523 citations99
USD733261SJun 30, 2015
Top plate
ASM IP HOLDING BV530 citations99
USD732644SJun 23, 2015
Top plate
ASM IP HOLDING BV540 citations99
USD732145SJun 16, 2015
Shower plate
ASM IP HOLDING BV528 citations99
USD726884SApr 14, 2015
Heater block
ASM IP HOLDING BV528 citations99
USD725168SMar 24, 2015
Heater block
ASM IP HOLDING BV507 citations99
USD724701SMar 17, 2015
Shower plate
ASM IP HOLDING BV528 citations99
USD720838SJan 6, 2015
Shower plate
ASM IP HOLDING BV548 citations99
US9885112B2Feb 6, 2018
Film forming apparatus
ASM IP HOLDING BV5 citations73
US10707106B2Jul 7, 2020
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules
ASM IP HOLDING BV1 citations63
TOKYO ELECTRON LTD
5 patentsUS12500100B2Dec 16, 2025
Connected processing container and substrate processing method
TOKYO ELECTRON LTD0 citations63
US12183603B2Dec 31, 2024
Processing module and processing method
TOKYO ELECTRON LTD0 citations63
US11996306B2May 28, 2024
Coupled processing containers, substrate processing system, and substrate processing method
TOKYO ELECTRON LTD0 citations63
US10867819B2Dec 15, 2020
Vacuum processing apparatus, vacuum processing system and vacuum processing method
TOKYO ELECTRON LTD1 citations60
US12387948B2Aug 12, 2025
System for processing substrate and maintenance method thereof
TOKYO ELECTRON LTD0 citations52